A step-and repeat camera system for generating microcircuit pattern arrays with submicron structures directly onto the surface of silicon wafers

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open access
Copyright: Kosel, Peter
CC BY-NC-ND 3.0
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Abstract
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http://hdl.handle.net/1959.4/55882
DOI
https://doi.org/10.26190/unsworks/4682
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Kosel, Peter
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Publication Year
1975
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Thesis
Degree Type
PhD Doctorate
UNSW Faculty
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download Kosel-006946259.pdf 26.07 MB Adobe Portable Document Format
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