Exploration of variables in the fabrication of pyrolysed photoresist Fairman, C en_US Yu, S en_US Liu, Guozhen en_US Downard, A en_US Hibbert, D. Brynn en_US Gooding, John en_US 2021-11-25T12:50:40Z 2021-11-25T12:50:40Z 2008 en_US
dc.description.abstract The increased use of pyrolysed photoresist films (PPF) as electrode material intensifies the need to know what fabrication variables are important in the pyrolysis process. The main factor effects of seven variables (three time/temperature heating levels plus the position in the furnace tube) in the fabrication of PPF were investigated by a Plackett and Burman, eight-run, experimental design. In the three-step pyrolysis programme, gas flow had a large effect on the surface cleanliness and roughness. It was also observed that the position in the furnace affected the resistivity of the PPF. Fabrication parameters that give rapid electron transfer to redox species in solution, that provide low surface oxide and that lead to low surface roughness were identified. The guidelines on what fabrication conditions to employ to give a variety of different electrode characteristics are presented. © 2008 Springer-Verlag. en_US
dc.identifier.issn 1432-8488 en_US
dc.language English
dc.language.iso EN en_US
dc.rights CC BY-NC-ND 3.0 en_US
dc.rights.uri en_US
dc.source Legacy MARC en_US
dc.subject.other Surfaces en_US
dc.subject.other Architectural design en_US
dc.subject.other Chemical reactions en_US
dc.subject.other Electrochemical electrodes en_US
dc.subject.other Electrolysis en_US
dc.subject.other Furnaces en_US
dc.subject.other Health en_US
dc.subject.other Lead en_US
dc.subject.other Metallizing en_US
dc.subject.other Petroleum engineering en_US
dc.subject.other Photoacoustic effect en_US
dc.subject.other Photoresistors en_US
dc.subject.other Photoresists en_US
dc.subject.other Pyrolysis en_US
dc.subject.other Surface properties en_US
dc.subject.other Surface roughness en_US
dc.title Exploration of variables in the fabrication of pyrolysed photoresist en_US
dc.type Journal Article en
dcterms.accessRights metadata only access
dspace.entity.type Publication en_US
unsw.identifier.doiPublisher en_US
unsw.relation.faculty Science
unsw.relation.ispartofissue 10 en_US
unsw.relation.ispartofjournal Journal of Solid State Electrochemistry en_US
unsw.relation.ispartofpagefrompageto 1357-1365 en_US
unsw.relation.ispartofvolume 12 en_US
unsw.relation.originalPublicationAffiliation Fairman, C en_US
unsw.relation.originalPublicationAffiliation Yu, S en_US
unsw.relation.originalPublicationAffiliation Liu, Guozhen, Chemistry, Faculty of Science, UNSW en_US
unsw.relation.originalPublicationAffiliation Downard, A en_US
unsw.relation.originalPublicationAffiliation Hibbert, D. Brynn, Chemistry, Faculty of Science, UNSW en_US
unsw.relation.originalPublicationAffiliation Gooding, John, Chemistry, Faculty of Science, UNSW en_US School of Chemistry *
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