Preparation of Site Specific Atom Probe Tips using Focused Ion Beam Technology

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Abstract
Specimen preparation for Atom Probe Tomography is a demanding process particularly if the features of interest are site specific. The Focused Ion Beam is evolving as a useful tool for the fabrication of such samples. This paper presents a new approach to fabricate site specific atom probe samples using a Focused Ion Beam instrument.
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Author(s)
McKenzie, Warren
McGrouther, Damien
Munroe, Paul
Saxey, David
Marceau, Ross
Ringer, Simon
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Publication Year
2006
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Conference Paper
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UNSW Faculty
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download M&M '06 conference paper.pdf 380.16 KB Adobe Portable Document Format
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