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Structural characterization of annealed Si1-x Cx /SiC multilayers targeting formation of Si nanocrystals in a SiC matrix
Structural characterization of annealed Si1-x Cx /SiC multilayers targeting formation of Si nanocrystals in a SiC matrix
dc.contributor.author | Song, Dengyuan | en_US |
dc.contributor.author | Cho, E.-C | en_US |
dc.contributor.author | Conibeer, Gavin | en_US |
dc.contributor.author | Huang, Yidan | en_US |
dc.contributor.author | Flynn, Christopher | en_US |
dc.contributor.author | Green, Martin | en_US |
dc.date.accessioned | 2021-11-25T13:29:49Z | |
dc.date.available | 2021-11-25T13:29:49Z | |
dc.date.issued | 2008 | en_US |
dc.description.abstract | Amorphous Si1-xCx /SiC multilayer films were prepared by alternating deposition of Si-rich Si1-xCx and near-stoichiometric SiC layers by using magnetron sputtering. The as-deposited films were annealed at different temperatures Ta from 800 to 1100 oC. The influence of Ta and Si content in the Si-rich layer on the layered structural stability and on the formation of Si and/or SiC nanocrystals NCs is investigated by a variety of analytical techniques, including x-ray reflectivity XRR, x-ray diffraction XRD, transmission electron microscopy TEM, Raman spectroscopy, and Fourier transform infrared spectrometry FTIR. XRR showed that Si1-xCx /SiC multilayers annealed at temperatures of up to 800 oC retain their layered structure. XRD revealed that Si NCs were formed in samples with a high Si content in the Si-rich layer for Ta 800 oC. At annealing temperatures of 900 oC or greater, the formation of Si NCs was accompanied by the formation of -SiC NCs. Additionally, the formation of Si and SiC NCs was confirmed by TEM imaging and Raman spectroscopy. The Si-NC size obtained from the TEM micrographs is within the range of 3-5 nm. The -SiC NCs are smaller 2-3 nm than Si NCs. Raman analysis identified an 9 cm-1 Raman peak shift in the Si-NC peak to a lower energy with respect to that for bulk Si. FTIR Si-C bond absorption spectra exhibited narrowing of the full width at half maximum and a peak shift toward a higher wave number with increasing Ta. This behavior can be explained by an increase in order as well as an increase in the number of Si-C bonds. | en_US |
dc.identifier.issn | 0021-8979 | en_US |
dc.identifier.uri | http://hdl.handle.net/1959.4/39733 | |
dc.language | English | |
dc.language.iso | EN | en_US |
dc.rights | CC BY-NC-ND 3.0 | en_US |
dc.rights.uri | https://creativecommons.org/licenses/by-nc-nd/3.0/au/ | en_US |
dc.source | Legacy MARC | en_US |
dc.subject.other | Multilayers | en_US |
dc.subject.other | Amorphous materials | en_US |
dc.subject.other | Annealing | en_US |
dc.subject.other | Nanocrystals | en_US |
dc.subject.other | Silicon carbide | en_US |
dc.subject.other | Silicon | en_US |
dc.title | Structural characterization of annealed Si1-x Cx /SiC multilayers targeting formation of Si nanocrystals in a SiC matrix | en_US |
dc.type | Journal Article | en |
dcterms.accessRights | open access | |
dspace.entity.type | Publication | en_US |
unsw.accessRights.uri | https://purl.org/coar/access_right/c_abf2 | |
unsw.description.publisherStatement | Copyright (2008) American Institute of Physics. This article may be downloaded for personal use only. Any other use requires prior permission of the author and the American Institute of Physics. The following article appeared in J. Appl. Phys. 103, 083544 (2008) and may be found at: http://link.aip.org/link/?JAPIAU/103/083544/1 | en_US |
unsw.identifier.doiPublisher | http://dx.doi.org/10.1063/1.2909913 | en_US |
unsw.relation.faculty | Engineering | |
unsw.relation.ispartofissue | 8 | en_US |
unsw.relation.ispartofjournal | Journal of Applied Physics | en_US |
unsw.relation.ispartofpagefrompageto | 83544 | en_US |
unsw.relation.ispartofvolume | 103 | en_US |
unsw.relation.originalPublicationAffiliation | Song, Dengyuan, Photovoltaics & Renewable Energy Engineering, Faculty of Engineering, UNSW | en_US |
unsw.relation.originalPublicationAffiliation | Cho, E.-C, Photovoltaics & Renewable Energy Engineering, Faculty of Engineering, UNSW | en_US |
unsw.relation.originalPublicationAffiliation | Conibeer, Gavin, Photovoltaics & Renewable Energy Engineering, Faculty of Engineering, UNSW | en_US |
unsw.relation.originalPublicationAffiliation | Huang, Yidan, Photovoltaics & Renewable Energy Engineering, Faculty of Engineering, UNSW | en_US |
unsw.relation.originalPublicationAffiliation | Flynn, Christopher, Photovoltaics & Renewable Energy Engineering, Faculty of Engineering, UNSW | en_US |
unsw.relation.originalPublicationAffiliation | Green, Martin, Photovoltaics & Renewable Energy Engineering, Faculty of Engineering, UNSW | en_US |
unsw.relation.school | School of Photovoltaic and Renewable Energy Engineering | * |
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