Publication:
Integration of Microlens with Planar Lightwave Circuit
Integration of Microlens with Planar Lightwave Circuit
| dc.contributor.author | Mackenzie, Mark | en_US |
| dc.contributor.author | Kwok, Chee | en_US |
| dc.contributor.author | Peng, Gang-Ding | en_US |
| dc.date.accessioned | 2021-11-25T14:38:58Z | |
| dc.date.available | 2021-11-25T14:38:58Z | |
| dc.date.issued | 2005 | en_US |
| dc.description.abstract | A silica micro-lens has been proposed which can be integrated with planar optical waveguide circuits. The lens pair enables an optical signal to travel in free space between two opposing planar waveguides with minimal optical loss. Each lens pair consists of a slab GRIN lens with a convexly shaped front face. This paper brieftly reviews the micro-lens design process and reports progress in fabircating the device. The characterisation of the GRIN layer and masking experiments used to evaluate the deep oxide etch are presented. A selectivity of 250:1 was achieved for the deep oxide etch using a NiCr mask. | en_US |
| dc.identifier.uri | http://hdl.handle.net/1959.4/43067 | |
| dc.language | English | |
| dc.language.iso | EN | en_US |
| dc.publisher | SPIE - The International Society for Optical Engineering | en_US |
| dc.rights | CC BY-NC-ND 3.0 | en_US |
| dc.rights.uri | https://creativecommons.org/licenses/by-nc-nd/3.0/au/ | en_US |
| dc.source | Legacy MARC | en_US |
| dc.subject.other | Silica | en_US |
| dc.subject.other | RIE | en_US |
| dc.subject.other | Microlens | en_US |
| dc.subject.other | Graded Index | en_US |
| dc.title | Integration of Microlens with Planar Lightwave Circuit | en_US |
| dc.type | Conference Paper | en |
| dcterms.accessRights | open access | |
| dspace.entity.type | Publication | en_US |
| unsw.accessRights.uri | https://purl.org/coar/access_right/c_abf2 | |
| unsw.description.notePublic | Mackenzie, MR., Kwok, CY. & Peng, G., "Integration of microlens with planar lightwave circuit," Photonics Packaging and Integration V, Randy A. Heyler, Ray T. Chen (eds), 5731, 30, (2005). | en_US |
| unsw.description.publisherStatement | Copyright 2005 Society of Photo-Optical Instrumentation Engineers. One print or electronic copy may be made for personal use only. Systematic reproduction and distribution, duplication of any material in this paper for a fee or for commercial purposes, or modification of the content of the paper are prohibited. | en_US |
| unsw.identifier.doiPublisher | http://dx.doi.org/10.1117/12.591373 | en_US |
| unsw.publisher.place | Bellingham, WA | en_US |
| unsw.relation.faculty | Engineering | |
| unsw.relation.ispartofconferenceLocation | San Jose, USA | en_US |
| unsw.relation.ispartofconferenceName | Photonics West 2005 | en_US |
| unsw.relation.ispartofconferenceProceedingsTitle | Photonics West 2005 | en_US |
| unsw.relation.ispartofconferenceYear | 2005 | en_US |
| unsw.relation.ispartofpagefrompageto | 30-38 | en_US |
| unsw.relation.originalPublicationAffiliation | Mackenzie, Mark, Electrical Engineering & Telecommunications, Faculty of Engineering, UNSW | en_US |
| unsw.relation.originalPublicationAffiliation | Kwok, Chee, Electrical Engineering & Telecommunications, Faculty of Engineering, UNSW | en_US |
| unsw.relation.originalPublicationAffiliation | Peng, Gang-Ding, Electrical Engineering & Telecommunications, Faculty of Engineering, UNSW | en_US |
| unsw.relation.school | School of Electrical Engineering and Telecommunications | * |
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